VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
NATIVE SILICON OXIDE / SILICON WAFER (90 DEG TOA)
1
(as received, no etching, no cleaning)
NORM
REGULAR
6
0
0
0
0
0
6
(as received, no etching, no cleaning)
NATIVE SILICON OXIDE / SILICON WAFER (90 DEG TOA)
2003
4
25
21
26
4
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
107
-0.0392157
2
counts
d
Transmission
d
pulse counting
0.2
40
4.00E-06
0
0
0
0
512
77
7047
0.312525
0.313882
345
0.313882
326
0.313876
349
0.313871
353
0.313866
321
0.31386
309
0.313855
352
0.31385
363
0.313844
327
0.313839
321
0.313834
332
0.313828
313
0.313823
305
0.313818
324
0.313812
329
0.313807
362
0.313801
312
0.313796
313
0.313791
332
0.313785
285
0.31378
316
0.313775
309
0.313769
309
0.313764
314
0.313759
323
0.313753
323
0.313748
325
0.313743
343
0.313737
318
0.313732
318
0.313727
307
0.313721
310
0.313716
308
0.313711
302
0.313705
318
0.3137
303
0.313695
295
0.313689
334
0.313684
365
0.313679
337
0.313673
347
0.313668
319
0.313662
324
0.313657
356
0.313652
338
0.313646
314
0.313641
359
0.313636
386
0.31363
388
0.313625
398
0.31362
446
0.313614
426
0.313609
453
0.313604
464
0.313598
500
0.313593
509
0.313588
569
0.313582
543
0.313577
617
0.313572
587
0.313566
628
0.313561
745
0.313556
703
0.31355
711
0.313545
775
0.31354
782
0.313534
858
0.313529
904
0.313524
903
0.313518
949
0.313513
1029
0.313508
1016
0.313502
1035
0.313497
1087
0.313492
1065
0.313486
1204
0.313481
1171
0.313476
1214
0.31347
1250
0.313465
1258
0.31346
1187
0.313454
1257
0.313449
1275
0.313444
1303
0.313438
1342
0.313433
1348
0.313428
1388
0.313422
1308
0.313417
1294
0.313412
1337
0.313406
1344
0.313401
1273
0.313396
1309
0.31339
1263
0.313385
1228
0.31338
1193
0.313374
1186
0.313369
1149
0.313364
1104
0.313358
1121
0.313353
1065
0.313348
1080
0.313342
981
0.313337
922
0.313332
898
0.313326
914
0.313321
834
0.313316
789
0.31331
836
0.313305
802
0.3133
685
0.313294
738
0.313289
713
0.313284
661
0.313278
644
0.313273
565
0.313268
602
0.313262
626
0.313257
542
0.313252
559
0.313246
563
0.313241
526
0.313236
520
0.31323
538
0.313225
538
0.31322
487
0.313214
429
0.313209
456
0.313204
441
0.313199
413
0.313193
433
0.313188
426
0.313183
395
0.313177
373
0.313172
396
0.313167
397
0.313161
403
0.313156
441
0.313151
410
0.313145
437
0.31314
448
0.313135
409
0.313129
408
0.313124
413
0.313119
457
0.313113
438
0.313108
436
0.313103
450
0.313097
466
0.313092
489
0.313087
491
0.313081
485
0.313076
570
0.313071
610
0.313066
628
0.31306
685
0.313055
752
0.31305
868
0.313044
999
0.313039
1097
0.313034
1349
0.313028
1521
0.313023
1787
0.313018
2014
0.313012
2224
0.313007
2698
0.313002
2906
0.312996
3248
0.312991
3605
0.312986
3832
0.312981
4111
0.312975
4304
0.31297
4297
0.312965
4452
0.312959
4461
0.312954
4480
0.312949
4480
0.312943
4594
0.312938
4616
0.312933
4828
0.312927
5109
0.312922
5474
0.312917
5882
0.312911
6313
0.312906
6732
0.312901
7047
0.312896
6994
0.31289
6848
0.312885
6704
0.31288
6454
0.312874
6018
0.312869
5253
0.312864
4797
0.312858
4139
0.312853
3664
0.312848
3013
0.312842
2486
0.312837
2075
0.312832
1720
0.312827
1455
0.312821
1154
0.312816
950
0.312811
822
0.312805
674
0.3128
580
0.312795
487
0.312789
400
0.312784
362
0.312779
341
0.312774
293
0.312768
261
0.312763
233
0.312758
215
0.312752
177
0.312747
180
0.312742
176
0.312736
164
0.312731
140
0.312726
140
0.31272
114
0.312715
142
0.31271
113
0.312705
117
0.312699
131
0.312694
109
0.312689
90
0.312683
95
0.312678
114
0.312673
122
0.312667
107
0.312662
102
0.312657
122
0.312652
123
0.312646
95
0.312641
113
0.312636
118
0.31263
111
0.312625
112
0.31262
105
0.312615
103
0.312609
108
0.312604
113
0.312599
128
0.312593
96
0.312588
97
0.312583
102
0.312577
105
0.312572
92
0.312567
100
0.312562
101
0.312556
117
0.312551
114
0.312546
96
0.31254
77
0.312535
94
0.31253
98
0.312525
(as received, no etching, no cleaning)
NATIVE SILICON OXIDE / SILICON WAFER (90 DEG TOA)
2003
4
25
21
26
4
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_2
data_2
-1
Binding energy
eV
542
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
40
4.00E-06
0
0
0
0
512
0
48998
0.389054
0.393976
1154
0.393976
1148
0.393956
1104
0.393936
1047
0.393917
1114
0.393897
1002
0.393877
1064
0.393858
1097
0.393838
968
0.393819
1100
0.393799
976
0.393779
984
0.39376
909
0.39374
1006
0.393721
959
0.393701
861
0.393681
794
0.393662
1042
0.393642
897
0.393623
894
0.393603
936
0.393583
991
0.393564
1099
0.393544
971
0.393525
1087
0.393505
1042
0.393486
975
0.393466
1021
0.393447
930
0.393427
1017
0.393407
964
0.393388
1045
0.393368
1060
0.393349
992
0.393329
1053
0.39331
986
0.39329
1036
0.393271
982
0.393251
1065
0.393232
997
0.393212
1036
0.393193
974
0.393173
977
0.393153
909
0.393134
1027
0.393114
1036
0.393095
1099
0.393075
1116
0.393056
1117
0.393036
1007
0.393017
1111
0.392997
1048
0.392978
972
0.392958
937
0.392939
950
0.392919
1080
0.3929
945
0.39288
957
0.392861
924
0.392841
1091
0.392822
1063
0.392803
1159
0.392783
919
0.392764
1027
0.392744
1078
0.392725
1140
0.392705
1039
0.392686
1016
0.392666
1100
0.392647
1138
0.392627
1075
0.392608
1096
0.392589
1242
0.392569
1225
0.39255
1382
0.39253
1330
0.392511
1353
0.392491
1408
0.392472
1558
0.392452
1635
0.392433
1713
0.392414
1807
0.392394
2001
0.392375
2206
0.392355
2424
0.392336
2582
0.392317
3052
0.392297
3357
0.392278
3526
0.392258
4279
0.392239
4666
0.39222
5161
0.3922
5715
0.392181
6571
0.392161
7423
0.392142
8298
0.392123
9216
0.392103
10564
0.392084
12095
0.392064
13620
0.392045
15441
0.392026
17393
0.392006
20107
0.391987
22771
0.391968
25388
0.391948
28160
0.391929
31418
0.39191
34405
0.39189
37616
0.391871
40664
0.391852
43080
0.391832
45413
0.391813
47228
0.391793
48813
0.391774
48909
0.391755
48998
0.391735
48661
0.391716
47232
0.391697
45294
0.391677
42957
0.391658
40450
0.391639
37635
0.39162
34767
0.3916
31596
0.391581
28619
0.391562
25936
0.391542
23098
0.391523
20499
0.391504
18127
0.391484
15827
0.391465
13971
0.391446
11896
0.391426
10474
0.391407
9076
0.391388
7658
0.391369
6436
0.391349
5445
0.39133
4542
0.391311
3753
0.391292
3278
0.391272
2813
0.391253
2313
0.391234
2018
0.391214
1753
0.391195
1546
0.391176
1401
0.391157
1362
0.391137
934
0.391118
865
0.391099
957
0.39108
705
0.39106
683
0.391041
575
0.391022
586
0.391003
426
0.390983
449
0.390964
527
0.390945
454
0.390926
408
0.390907
384
0.390887
469
0.390868
338
0.390849
411
0.39083
350
0.39081
427
0.390791
405
0.390772
284
0.390753
366
0.390734
400
0.390714
209
0.390695
262
0.390676
298
0.390657
506
0.390638
277
0.390619
339
0.390599
251
0.39058
249
0.390561
175
0.390542
218
0.390523
308
0.390503
353
0.390484
334
0.390465
120
0.390446
345
0.390427
365
0.390408
278
0.390388
289
0.390369
193
0.39035
208
0.390331
372
0.390312
284
0.390293
332
0.390274
214
0.390254
226
0.390235
246
0.390216
322
0.390197
320
0.390178
223
0.390159
156
0.39014
138
0.390121
219
0.390101
300
0.390082
240
0.390063
315
0.390044
182
0.390025
239
0.390006
175
0.389987
187
0.389968
203
0.389949
342
0.389929
192
0.38991
261
0.389891
126
0.389872
169
0.389853
149
0.389834
261
0.389815
93
0.389796
130
0.389777
263
0.389758
209
0.389739
250
0.38972
217
0.389701
239
0.389681
144
0.389662
288
0.389643
233
0.389624
253
0.389605
218
0.389586
284
0.389567
232
0.389548
0
0.389529
122
0.38951
186
0.389491
355
0.389472
282
0.389453
273
0.389434
212
0.389415
207
0.389396
429
0.389377
239
0.389358
75
0.389339
145
0.38932
267
0.389301
269
0.389282
356
0.389263
238
0.389244
228
0.389225
302
0.389206
249
0.389187
314
0.389168
323
0.389149
298
0.38913
215
0.389111
149
0.389092
289
0.389073
207
0.389054
(as received, no etching, no cleaning)
NATIVE SILICON OXIDE / SILICON WAFER (90 DEG TOA)
2003
4
25
21
26
5
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_3
data_3
-1
Binding energy
eV
298
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
20
4.00E-06
0
0
0
0
512
0
6619
0.33982
0.343239
97
0.343239
233
0.343225
258
0.343212
254
0.343198
191
0.343185
329
0.343171
220
0.343157
168
0.343144
154
0.34313
224
0.343117
163
0.343103
117
0.34309
164
0.343076
235
0.343062
218
0.343049
154
0.343035
172
0.343022
213
0.343008
221
0.342995
228
0.342981
227
0.342967
204
0.342954
127
0.34294
213
0.342927
263
0.342913
164
0.3429
119
0.342886
200
0.342873
163
0.342859
190
0.342845
110
0.342832
210
0.342818
130
0.342805
158
0.342791
204
0.342778
123
0.342764
219
0.342751
147
0.342737
312
0.342724
134
0.34271
69
0.342697
163
0.342683
170
0.342669
114
0.342656
180
0.342642
197
0.342629
167
0.342615
221
0.342602
196
0.342588
204
0.342575
133
0.342561
208
0.342548
80
0.342534
241
0.342521
207
0.342507
191
0.342494
290
0.34248
164
0.342467
207
0.342453
196
0.34244
279
0.342426
186
0.342413
206
0.342399
213
0.342386
145
0.342372
176
0.342359
249
0.342345
143
0.342332
264
0.342318
183
0.342305
184
0.342291
236
0.342278
116
0.342264
217
0.342251
210
0.342237
170
0.342224
154
0.34221
231
0.342197
258
0.342183
136
0.34217
162
0.342156
129
0.342143
324
0.342129
280
0.342116
219
0.342102
264
0.342089
154
0.342076
262
0.342062
191
0.342049
277
0.342035
198
0.342022
345
0.342008
342
0.341995
382
0.341981
389
0.341968
359
0.341954
484
0.341941
486
0.341927
481
0.341914
491
0.341901
594
0.341887
751
0.341874
784
0.34186
756
0.341847
687
0.341833
707
0.34182
783
0.341806
655
0.341793
701
0.34178
688
0.341766
753
0.341753
637
0.341739
705
0.341726
572
0.341712
676
0.341699
656
0.341686
769
0.341672
711
0.341659
731
0.341645
660
0.341632
855
0.341618
826
0.341605
931
0.341592
915
0.341578
854
0.341565
1059
0.341551
1054
0.341538
1113
0.341525
1257
0.341511
1403
0.341498
1526
0.341484
1642
0.341471
1621
0.341458
1712
0.341444
1942
0.341431
1979
0.341417
2068
0.341404
2249
0.341391
2261
0.341377
2371
0.341364
2485
0.34135
2591
0.341337
2725
0.341324
2842
0.34131
3065
0.341297
3355
0.341283
3456
0.34127
3927
0.341257
4263
0.341243
4475
0.34123
4988
0.341217
5362
0.341203
5638
0.34119
6125
0.341176
6356
0.341163
6456
0.34115
6591
0.341136
6619
0.341123
6450
0.34111
6323
0.341096
5901
0.341083
5541
0.341069
4968
0.341056
4489
0.341043
4050
0.341029
3314
0.341016
2893
0.341003
2326
0.340989
1985
0.340976
1626
0.340963
1445
0.340949
1187
0.340936
941
0.340923
865
0.340909
670
0.340896
578
0.340883
467
0.340869
474
0.340856
385
0.340843
397
0.340829
259
0.340816
249
0.340803
280
0.340789
203
0.340776
75
0.340763
158
0.340749
247
0.340736
148
0.340723
101
0.340709
147
0.340696
111
0.340683
113
0.340669
73
0.340656
70
0.340643
79
0.340629
135
0.340616
163
0.340603
93
0.340589
93
0.340576
14
0.340563
82
0.340549
32
0.340536
136
0.340523
90
0.34051
138
0.340496
135
0.340483
94
0.34047
98
0.340456
88
0.340443
136
0.34043
104
0.340416
74
0.340403
112
0.34039
136
0.340377
83
0.340363
49
0.34035
27
0.340337
26
0.340323
72
0.34031
98
0.340297
119
0.340284
120
0.34027
85
0.340257
94
0.340244
3
0.34023
3
0.340217
117
0.340204
141
0.340191
140
0.340177
181
0.340164
171
0.340151
137
0.340138
123
0.340124
0
0.340111
58
0.340098
139
0.340085
29
0.340071
123
0.340058
179
0.340045
151
0.340031
129
0.340018
114
0.340005
107
0.339992
120
0.339978
123
0.339965
88
0.339952
91
0.339939
155
0.339926
95
0.339912
52
0.339899
85
0.339886
89
0.339873
92
0.339859
141
0.339846
212
0.339833
96
0.33982
(as received, no etching, no cleaning)
NATIVE SILICON OXIDE / SILICON WAFER (90 DEG TOA)
2003
4
25
21
26
5
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
150
1
0
0
1000
2000
55
0
data_4
data_4
-1
Binding energy
eV
1000
-0.977517
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
2048
56
80709
0.300125
0.586563
11984
0.586563
12020
0.585857
11480
0.585154
11450
0.584452
11058
0.583753
10982
0.583056
10647
0.582362
10473
0.581669
10251
0.580979
10041
0.580291
10296
0.579605
10574
0.578921
10408
0.578239
10558
0.57756
10734
0.576883
11389
0.576207
12382
0.575534
13415
0.574863
14101
0.574194
15263
0.573527
16109
0.572862
16336
0.5722
15299
0.571539
14188
0.57088
12917
0.570223
11701
0.569569
10974
0.568916
10355
0.568265
9744
0.567617
8972
0.56697
8284
0.566325
7705
0.565682
7022
0.565041
6638
0.564402
6327
0.563765
6244
0.56313
6122
0.562497
6137
0.561866
6018
0.561236
6114
0.560609
6149
0.559983
6047
0.559359
6005
0.558737
6006
0.558117
6062
0.557499
6060
0.556882
6043
0.556268
6063
0.555655
6055
0.555044
6090
0.554434
6158
0.553827
6126
0.553221
6152
0.552617
6204
0.552015
6277
0.551415
6113
0.550816
6219
0.550219
6024
0.549624
6197
0.54903
6277
0.548438
6293
0.547848
6174
0.54726
6282
0.546673
6259
0.546088
6259
0.545504
6283
0.544922
6290
0.544342
6367
0.543764
6165
0.543187
6201
0.542612
6422
0.542038
6142
0.541466
6297
0.540896
6418
0.540327
6514
0.53976
6405
0.539194
6279
0.53863
6389
0.538068
6445
0.537507
6450
0.536948
6412
0.53639
6466
0.535834
6402
0.535279
6571
0.534726
6367
0.534174
6488
0.533624
6400
0.533075
6515
0.532528
6465
0.531983
6460
0.531438
6554
0.530896
6530
0.530355
6652
0.529815
6573
0.529277
6550
0.52874
6562
0.528204
6697
0.527671
6673
0.527138
6691
0.526607
6679
0.526077
6785
0.525549
6730
0.525022
6748
0.524497
6774
0.523973
6817
0.52345
6800
0.522929
6727
0.522409
6845
0.521891
6753
0.521374
6800
0.520858
6668
0.520344
6775
0.519831
6688
0.519319
6797
0.518809
6665
0.5183
6811
0.517792
6866
0.517286
6882
0.516781
6939
0.516277
7035
0.515775
7003
0.515274
6732
0.514774
6855
0.514276
6883
0.513778
7006
0.513282
6988
0.512788
6887
0.512294
6898
0.511802
6999
0.511311
6979
0.510822
7070
0.510333
7220
0.509846
7178
0.50936
7001
0.508876
6961
0.508392
7045
0.50791
7081
0.507429
7129
0.506949
7155
0.506471
7091
0.505993
7200
0.505517
7410
0.505042
7242
0.504569
7216
0.504096
7181
0.503625
7315
0.503154
7399
0.502685
7482
0.502217
7240
0.501751
7337
0.501285
7422
0.500821
7389
0.500357
7313
0.499895
7434
0.499434
7378
0.498974
7431
0.498515
7544
0.498058
7511
0.497601
7437
0.497146
7358
0.496692
7459
0.496238
7421
0.495786
7471
0.495335
7472
0.494885
7436
0.494437
7535
0.493989
7508
0.493542
7464
0.493097
7681
0.492652
7631
0.492209
7683
0.491766
7718
0.491325
7757
0.490885
7708
0.490445
7593
0.490007
7597
0.48957
7680
0.489134
7514
0.488699
7392
0.488265
7485
0.487832
7672
0.4874
7709
0.486969
7524
0.486539
7686
0.48611
7676
0.485682
7597
0.485255
7622
0.48483
7596
0.484405
7804
0.483981
7905
0.483558
7784
0.483136
7710
0.482715
7775
0.482295
7689
0.481876
7837
0.481458
7780
0.481041
8048
0.480624
7702
0.480209
7740
0.479795
7831
0.479382
7888
0.47897
7851
0.478558
7858
0.478148
8019
0.477738
8021
0.47733
8077
0.476922
8013
0.476515
7937
0.47611
8096
0.475705
8180
0.475301
7965
0.474898
8156
0.474496
8051
0.474094
8110
0.473694
8098
0.473295
8264
0.472896
8107
0.472499
8324
0.472102
7884
0.471706
8253
0.471311
8130
0.470917
8300
0.470524
8131
0.470131
8313
0.46974
8183
0.469349
8143
0.46896
8373
0.468571
8381
0.468183
8382
0.467796
8508
0.467409
8499
0.467024
8257
0.466639
8495
0.466256
8298
0.465873
8331
0.465491
8341
0.465109
8170
0.464729
8279
0.464349
8599
0.463971
8668
0.463593
8365
0.463215
8414
0.462839
8636
0.462464
8628
0.462089
8509
0.461715
8576
0.461342
8563
0.46097
8810
0.460598
8513
0.460228
8687
0.459858
8630
0.459489
8699
0.459121
8752
0.458753
8752
0.458386
8643
0.45802
8638
0.457655
8759
0.457291
8610
0.456927
8858
0.456564
8892
0.456202
8882
0.455841
8749
0.455481
8799
0.455121
8770
0.454762
8919
0.454403
9030
0.454046
9035
0.453689
8830
0.453333
8992
0.452978
9090
0.452623
8988
0.452269
9095
0.451916
9051
0.451564
8865
0.451213
9067
0.450862
9015
0.450511
8948
0.450162
9199
0.449813
9139
0.449465
9178
0.449118
9123
0.448772
9061
0.448426
9210
0.448081
9281
0.447736
9205
0.447393
9276
0.44705
9347
0.446707
9286
0.446366
9495
0.446025
9635
0.445684
9656
0.445345
9432
0.445006
9455
0.444668
9585
0.44433
9504
0.443994
9353
0.443658
9514
0.443322
9285
0.442987
9310
0.442653
9434
0.44232
9412
0.441987
9269
0.441655
9485
0.441324
9582
0.440993
9656
0.440663
9488
0.440333
9550
0.440005
9570
0.439676
9606
0.439349
9703
0.439022
9424
0.438696
9429
0.438371
9529
0.438046
9681
0.437721
9574
0.437398
9727
0.437075
9721
0.436752
9684
0.436431
9844
0.43611
10247
0.435789
10341
0.435469
10113
0.43515
9907
0.434832
9919
0.434514
9690
0.434196
9779
0.43388
9864
0.433564
9779
0.433248
9935
0.432933
9917
0.432619
9865
0.432305
9872
0.431992
10063
0.43168
10132
0.431368
10186
0.431057
9909
0.430746
10019
0.430436
10071
0.430127
9877
0.429818
10186
0.42951
10241
0.429202
10405
0.428895
10168
0.428588
10290
0.428282
10317
0.427977
10378
0.427672
10382
0.427368
10615
0.427065
10318
0.426762
10493
0.426459
10425
0.426157
10483
0.425856
10586
0.425555
10668
0.425255
10493
0.424955
10562
0.424656
10591
0.424358
10772
0.42406
10616
0.423762
10732
0.423466
10814
0.423169
10940
0.422874
10829
0.422579
11083
0.422284
10837
0.42199
10959
0.421696
10831
0.421403
10890
0.421111
11033
0.420819
10999
0.420528
11174
0.420237
11161
0.419946
11146
0.419657
11096
0.419368
11271
0.419079
11161
0.418791
11307
0.418503
11478
0.418216
11308
0.417929
11439
0.417643
11723
0.417358
11482
0.417073
11549
0.416788
11577
0.416504
11581
0.416221
11797
0.415938
11796
0.415655
11828
0.415373
11808
0.415092
11947
0.414811
11846
0.414531
12049
0.414251
11970
0.413971
12088
0.413693
11994
0.413414
11972
0.413136
12119
0.412859
12275
0.412582
12057
0.412305
12357
0.41203
12537
0.411754
12458
0.411479
12560
0.411205
12583
0.410931
12509
0.410657
12686
0.410384
12846
0.410112
12880
0.40984
12878
0.409568
12902
0.409297
12967
0.409027
12747
0.408757
13038
0.408487
13270
0.408218
13134
0.407949
13372
0.407681
13361
0.407413
13593
0.407146
13396
0.406879
13420
0.406613
13533
0.406347
13757
0.406081
13857
0.405816
13962
0.405552
14219
0.405288
13893
0.405024
14225
0.404761
14032
0.404499
14252
0.404236
14249
0.403975
14198
0.403713
14255
0.403452
14510
0.403192
14335
0.402932
14491
0.402673
14724
0.402414
14651
0.402155
14778
0.401897
14747
0.401639
15129
0.401382
15013
0.401125
14790
0.400868
14822
0.400612
14885
0.400357
15052
0.400102
15431
0.399847
15639
0.399593
16164
0.399339
16495
0.399086
16674
0.398833
17069
0.39858
17542
0.398328
17350
0.398076
17602
0.397825
17836
0.397574
18011
0.397324
17881
0.397074
17170
0.396824
16742
0.396575
16298
0.396326
15827
0.396078
15822
0.39583
15401
0.395583
14865
0.395335
14604
0.395089
14168
0.394843
13831
0.394597
13087
0.394351
12880
0.394106
12468
0.393862
12264
0.393617
12265
0.393374
12355
0.39313
12577
0.392887
13823
0.392644
19083
0.392402
37909
0.39216
80709
0.391919
80308
0.391678
34794
0.391437
15505
0.391197
12126
0.390957
11523
0.390718
11145
0.390479
10954
0.39024
10801
0.390002
10820
0.389764
10687
0.389526
10746
0.389289
10601
0.389052
10702
0.388816
10647
0.38858
10817
0.388344
10991
0.388109
10886
0.387874
10939
0.38764
10959
0.387406
10985
0.387172
10860
0.386939
10734
0.386706
10777
0.386473
11041
0.386241
10949
0.386009
10937
0.385778
11177
0.385547
10911
0.385316
10861
0.385086
11030
0.384856
11087
0.384626
11174
0.384397
10904
0.384168
11014
0.383939
11156
0.383711
11424
0.383483
11436
0.383256
11936
0.383029
11651
0.382802
11244
0.382576
11094
0.38235
11305
0.382124
11114
0.381899
11029
0.381674
11238
0.381449
11718
0.381225
12256
0.381001
11711
0.380777
11121
0.380554
11345
0.380331
11457
0.380109
11244
0.379887
11264
0.379665
11293
0.379443
11171
0.379222
11487
0.379001
11552
0.378781
11334
0.378561
11326
0.378341
11224
0.378122
11374
0.377903
11441
0.377684
11357
0.377465
11567
0.377247
11604
0.37703
11670
0.376812
11508
0.376595
11389
0.376379
11663
0.376162
11550
0.375946
11610
0.37573
11424
0.375515
11612
0.3753
11653
0.375085
11510
0.374871
11584
0.374657
11792
0.374443
11805
0.374229
11772
0.374016
11747
0.373803
11516
0.373591
11795
0.373379
11940
0.373167
11597
0.372956
11593
0.372744
11941
0.372533
11901
0.372323
11905
0.372113
11866
0.371903
11868
0.371693
11730
0.371484
11816
0.371275
11866
0.371066
11851
0.370858
11985
0.37065
11905
0.370442
11999
0.370235
11847
0.370028
11965
0.369821
12034
0.369614
12116
0.369408
12106
0.369202
12165
0.368997
12166
0.368791
11994
0.368586
11887
0.368382
12069
0.368177
12121
0.367973
12171
0.36777
12150
0.367566
12177
0.367363
12383
0.36716
12286
0.366958
12249
0.366755
12257
0.366553
12180
0.366352
12313
0.36615
12310
0.365949
12289
0.365749
12392
0.365548
12381
0.365348
12343
0.365148
12428
0.364948
12345
0.364749
12332
0.36455
12490
0.364351
12500
0.364153
12485
0.363955
12605
0.363757
12725
0.363559
12585
0.363362
12706
0.363165
13264
0.362968
13841
0.362772
13774
0.362576
13659
0.36238
13099
0.362184
12660
0.361989
12661
0.361794
12520
0.361599
12567
0.361404
12587
0.36121
12471
0.361016
12614
0.360823
12756
0.360629
12419
0.360436
12587
0.360243
12712
0.360051
12662
0.359859
12598
0.359667
12679
0.359475
12903
0.359283
12830
0.359092
12650
0.358901
12753
0.358711
12780
0.35852
12684
0.35833
12880
0.35814
12678
0.357951
12890
0.357762
12967
0.357573
13023
0.357384
13111
0.357195
12865
0.357007
13040
0.356819
12901
0.356631
12812
0.356444
13097
0.356257
13083
0.35607
13116
0.355883
13145
0.355697
13223
0.355511
13214
0.355325
13207
0.355139
13382
0.354954
13329
0.354769
13279
0.354584
13422
0.354399
13412
0.354215
13329
0.354031
13376
0.353847
13475
0.353664
13620
0.35348
13623
0.353297
13306
0.353114
13376
0.352932
13445
0.352749
13279
0.352567
13948
0.352386
13690
0.352204
14056
0.352023
13729
0.351842
13736
0.351661
13922
0.35148
14097
0.3513
14098
0.35112
13775
0.35094
13897
0.350761
14080
0.350581
14170
0.350402
13921
0.350223
14026
0.350045
14150
0.349866
13964
0.349688
14373
0.34951
14182
0.349333
14374
0.349155
14372
0.348978
14395
0.348801
14388
0.348625
14503
0.348448
14407
0.348272
14709
0.348096
14633
0.34792
15013
0.347745
14659
0.34757
14904
0.347395
14956
0.34722
14929
0.347045
15189
0.346871
14840
0.346697
15167
0.346523
15190
0.34635
15212
0.346176
15324
0.346003
15334
0.34583
15343
0.345657
15255
0.345485
15087
0.345313
15455
0.345141
15305
0.344969
15526
0.344797
15620
0.344626
15676
0.344455
15726
0.344284
15459
0.344113
15365
0.343943
15295
0.343773
15225
0.343603
15114
0.343433
15346
0.343264
15121
0.343094
15334
0.342925
15228
0.342756
15182
0.342588
15056
0.342419
15243
0.342251
15653
0.342083
16696
0.341916
17827
0.341748
19707
0.341581
24968
0.341414
34573
0.341247
36204
0.34108
21015
0.340914
15554
0.340747
14816
0.340581
14831
0.340416
14868
0.34025
14882
0.340085
14644
0.33992
14832
0.339755
14804
0.33959
14981
0.339425
15187
0.339261
15114
0.339097
14913
0.338933
15062
0.33877
15113
0.338606
15200
0.338443
15361
0.33828
15407
0.338117
15144
0.337954
15306
0.337792
15545
0.33763
15332
0.337468
15377
0.337306
15460
0.337144
15638
0.336983
15737
0.336822
15505
0.336661
15753
0.3365
15686
0.33634
15925
0.336179
15866
0.336019
15940
0.335859
16026
0.3357
15906
0.33554
16197
0.335381
16055
0.335222
16136
0.335063
16231
0.334904
16131
0.334745
16266
0.334587
16250
0.334429
16191
0.334271
16565
0.334113
16425
0.333956
16705
0.333798
16661
0.333641
16762
0.333484
16776
0.333328
16796
0.333171
16969
0.333015
16963
0.332859
17210
0.332703
17500
0.332547
17299
0.332391
17217
0.332236
17320
0.332081
17130
0.331926
17401
0.331771
17361
0.331616
17421
0.331462
17653
0.331308
17803
0.331154
17826
0.331
17960
0.330846
18028
0.330693
17981
0.33054
18096
0.330386
18237
0.330234
18001
0.330081
17958
0.329928
18042
0.329776
18038
0.329624
17950
0.329472
18077
0.32932
18218
0.329169
18094
0.329017
18841
0.328866
18469
0.328715
18874
0.328564
19041
0.328414
19129
0.328263
19305
0.328113
19418
0.327963
19392
0.327813
19531
0.327663
19514
0.327513
19124
0.327364
18872
0.327215
18990
0.327066
18862
0.326917
18753
0.326768
18659
0.32662
18842
0.326472
19258
0.326324
19193
0.326176
19397
0.326028
19737
0.32588
19921
0.325733
20586
0.325586
21025
0.325439
21045
0.325292
21258
0.325145
21172
0.324999
20719
0.324852
19878
0.324706
19521
0.32456
19181
0.324414
18947
0.324269
18648
0.324123
18683
0.323978
18716
0.323833
18791
0.323688
18980
0.323543
19559
0.323399
19866
0.323254
20716
0.32311
22100
0.322966
24123
0.322822
25632
0.322678
25602
0.322535
23590
0.322391
21139
0.322248
18467
0.322105
16980
0.321962
15631
0.321819
14902
0.321677
14366
0.321534
14125
0.321392
14136
0.32125
14266
0.321108
14513
0.320967
16561
0.320825
20374
0.320684
23197
0.320543
22361
0.320401
27042
0.320261
47249
0.32012
45466
0.319979
21057
0.319839
13857
0.319699
12093
0.319559
10880
0.319419
10510
0.319279
10190
0.31914
10202
0.319
10145
0.318861
10165
0.318722
10151
0.318583
10340
0.318444
10535
0.318306
10876
0.318167
11057
0.318029
11551
0.317891
11936
0.317753
11722
0.317615
11301
0.317477
10905
0.31734
10085
0.317203
9489
0.317065
8986
0.316928
8802
0.316792
8773
0.316655
8828
0.316518
8812
0.316382
8966
0.316246
9254
0.31611
9637
0.315974
10160
0.315838
10829
0.315702
12429
0.315567
14048
0.315432
15401
0.315297
14374
0.315162
11745
0.315027
9102
0.314892
7343
0.314758
6081
0.314623
5377
0.314489
4910
0.314355
4457
0.314221
4223
0.314087
4249
0.313954
4072
0.31382
4594
0.313687
8249
0.313554
13195
0.313421
10038
0.313288
7971
0.313155
23493
0.313023
48338
0.31289
14837
0.312758
2229
0.312626
1505
0.312494
1332
0.312362
1209
0.312231
1116
0.312099
1051
0.311968
1062
0.311837
1009
0.311705
978
0.311575
980
0.311444
1020
0.311313
969
0.311183
1028
0.311052
1000
0.310922
1063
0.310792
1011
0.310662
988
0.310533
1022
0.310403
1002
0.310273
1014
0.310144
1048
0.310015
1041
0.309886
1089
0.309757
1106
0.309628
1128
0.3095
1075
0.309371
1059
0.309243
1122
0.309115
1084
0.308987
1076
0.308859
1114
0.308731
1135
0.308603
1106
0.308476
1081
0.308349
1142
0.308221
1123
0.308094
1189
0.307967
1183
0.307841
1216
0.307714
1221
0.307588
1224
0.307461
1212
0.307335
1253
0.307209
1270
0.307083
1201
0.306957
1244
0.306832
1250
0.306706
1236
0.306581
1260
0.306455
1282
0.30633
1270
0.306205
1371
0.30608
1340
0.305956
1346
0.305831
1325
0.305707
1367
0.305582
1362
0.305458
1370
0.305334
1341
0.30521
1357
0.305087
1326
0.304963
1292
0.304839
1349
0.304716
1246
0.304593
1256
0.30447
1281
0.304347
1321
0.304224
1369
0.304101
1484
0.303979
1668
0.303856
1825
0.303734
2210
0.303612
2708
0.30349
3172
0.303368
3271
0.303246
2850
0.303124
1912
0.303003
1424
0.302881
1256
0.30276
1247
0.302639
1191
0.302518
1100
0.302397
971
0.302276
950
0.302156
1029
0.302035
1193
0.301915
1257
0.301795
1332
0.301674
1582
0.301554
1617
0.301435
1510
0.301315
1517
0.301195
1709
0.301076
1494
0.300956
1022
0.300837
978
0.300718
995
0.300599
901
0.30048
556
0.300362
193
0.300243
56
0.300125
(as received, no etching, no cleaning)
NATIVE SILICON OXIDE / SILICON WAFER (90 DEG TOA)
2003
4
25
21
26
5
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_5
data_5
-1
Binding energy
eV
107
-0.0392157
2
counts
d
Transmission
d
pulse counting
0.2
80
4.00E-06
0
0
0
0
512
58
3406
0.312525
0.313882
164
0.313882
173
0.313876
162
0.313871
169
0.313866
170
0.31386
163
0.313855
159
0.31385
165
0.313844
140
0.313839
149
0.313834
156
0.313828
188
0.313823
159
0.313818
148
0.313812
159
0.313807
159
0.313801
177
0.313796
159
0.313791
156
0.313785
159
0.31378
165
0.313775
158
0.313769
134
0.313764
159
0.313759
161
0.313753
183
0.313748
161
0.313743
144
0.313737
169
0.313732
158
0.313727
136
0.313721
155
0.313716
162
0.313711
159
0.313705
153
0.3137
156
0.313695
177
0.313689
155
0.313684
149
0.313679
186
0.313673
183
0.313668
180
0.313662
172
0.313657
169
0.313652
166
0.313646
179
0.313641
144
0.313636
181
0.31363
191
0.313625
188
0.31362
203
0.313614
201
0.313609
227
0.313604
231
0.313598
256
0.313593
240
0.313588
275
0.313582
270
0.313577
247
0.313572
259
0.313566
312
0.313561
290
0.313556
342
0.31355
353
0.313545
366
0.31354
405
0.313534
381
0.313529
409
0.313524
427
0.313518
430
0.313513
470
0.313508
443
0.313502
505
0.313497
480
0.313492
528
0.313486
556
0.313481
522
0.313476
549
0.31347
535
0.313465
516
0.31346
568
0.313454
609
0.313449
591
0.313444
529
0.313438
550
0.313433
584
0.313428
588
0.313422
616
0.313417
578
0.313412
607
0.313406
613
0.313401
513
0.313396
543
0.31339
566
0.313385
543
0.31338
495
0.313374
483
0.313369
448
0.313364
469
0.313358
475
0.313353
446
0.313348
489
0.313342
431
0.313337
417
0.313332
385
0.313326
363
0.313321
356
0.313316
334
0.31331
316
0.313305
292
0.3133
304
0.313294
277
0.313289
273
0.313284
295
0.313278
253
0.313273
277
0.313268
257
0.313262
274
0.313257
199
0.313252
263
0.313246
231
0.313241
238
0.313236
227
0.31323
226
0.313225
216
0.31322
206
0.313214
229
0.313209
234
0.313204
198
0.313199
200
0.313193
183
0.313188
183
0.313183
192
0.313177
164
0.313172
175
0.313167
160
0.313161
190
0.313156
203
0.313151
203
0.313145
197
0.31314
169
0.313135
156
0.313129
221
0.313124
201
0.313119
207
0.313113
235
0.313108
198
0.313103
210
0.313097
244
0.313092
238
0.313087
238
0.313081
241
0.313076
213
0.313071
245
0.313066
278
0.31306
270
0.313055
345
0.31305
360
0.313044
400
0.313039
443
0.313034
514
0.313028
626
0.313023
698
0.313018
787
0.313012
880
0.313007
1104
0.313002
1239
0.312996
1394
0.312991
1595
0.312986
1800
0.312981
1863
0.312975
1963
0.31297
2052
0.312965
2027
0.312959
1948
0.312954
1950
0.312949
1895
0.312943
1943
0.312938
1839
0.312933
1911
0.312927
1969
0.312922
2254
0.312917
2476
0.312911
2617
0.312906
2917
0.312901
3210
0.312896
3355
0.31289
3406
0.312885
3255
0.31288
3138
0.312874
2884
0.312869
2595
0.312864
2171
0.312858
1787
0.312853
1360
0.312848
1090
0.312842
876
0.312837
686
0.312832
522
0.312827
379
0.312821
331
0.312816
239
0.312811
225
0.312805
218
0.3128
171
0.312795
151
0.312789
146
0.312784
129
0.312779
118
0.312774
104
0.312768
83
0.312763
100
0.312758
85
0.312752
77
0.312747
102
0.312742
87
0.312736
79
0.312731
72
0.312726
92
0.31272
80
0.312715
82
0.31271
80
0.312705
88
0.312699
83
0.312694
69
0.312689
80
0.312683
58
0.312678
71
0.312673
75
0.312667
78
0.312662
65
0.312657
79
0.312652
64
0.312646
70
0.312641
72
0.312636
62
0.31263
64
0.312625
74
0.31262
76
0.312615
73
0.312609
71
0.312604
87
0.312599
83
0.312593
80
0.312588
58
0.312583
63
0.312577
70
0.312572
63
0.312567
82
0.312562
85
0.312556
73
0.312551
86
0.312546
73
0.31254
64
0.312535
63
0.31253
77
0.312525
(as received, no etching, no cleaning)
NATIVE SILICON OXIDE / SILICON WAFER (90 DEG TOA)
2003
4
25
21
26
5
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_6
data_6
-1
Binding energy
eV
3
-0.023622
2
counts
d
Transmission
d
pulse counting
0.2
1
4.00E-06
0
0
0
0
256
0
1.084
0.300125
0.300489
0
0.300489
0
0.300486
0
0.300483
0
0.30048
0
0.300477
0
0.300474
0
0.300471
0
0.300468
0
0.300466
0
0.300463
0
0.30046
1.084
0.300457
0
0.300454
0
0.300451
0
0.300448
0
0.300445
0
0.300443
0
0.30044
0
0.300437
0
0.300434
0
0.300431
0
0.300428
0
0.300425
0
0.300423
0
0.30042
0
0.300417
0
0.300414
0
0.300411
0
0.300408
0
0.300405
0
0.300402
0
0.3004
0
0.300397
0
0.300394
0
0.300391
0
0.300388
0
0.300385
0
0.300382
0
0.30038
0
0.300377
0
0.300374
0
0.300371
0
0.300368
0
0.300365
0
0.300362
0
0.300359
0
0.300357
0
0.300354
0
0.300351
0
0.300348
0
0.300345
0
0.300342
0
0.300339
0
0.300336
0
0.300334
0
0.300331
0
0.300328
0
0.300325
0
0.300322
0
0.300319
0
0.300316
0
0.300314
0
0.300311
0
0.300308
0
0.300305
0
0.300302
0
0.300299
0
0.300296
0
0.300293
0
0.300291
0
0.300288
0
0.300285
0
0.300282
0
0.300279
0
0.300276
0
0.300273
0
0.300271
0
0.300268
0
0.300265
0
0.300262
0
0.300259
0
0.300256
0
0.300253
0
0.300251
0
0.300248
0
0.300245
0
0.300242
0
0.300239
0
0.300236
0
0.300233
0
0.30023
0
0.300228
0
0.300225
0
0.300222
0
0.300219
0
0.300216
0
0.300213
0
0.30021
0
0.300208
0
0.300205
0
0.300202
0
0.300199
0
0.300196
0
0.300193
0
0.30019
0
0.300188
0
0.300185
0
0.300182
0
0.300179
0
0.300176
0
0.300173
0
0.30017
0
0.300167
0
0.300165
0
0.300162
0
0.300159
0
0.300156
0
0.300153
0
0.30015
0
0.300147
0
0.300145
0
0.300142
0
0.300139
0
0.300136
0
0.300133
0
0.30013
0
0.300127
0
0.300125
end of experiment
